Product
Unique Powder ALD and MLD
- We offer state-of-the-art powder coating ALD and MLD equipment that dramatically increase lithium battery, metal , fluorescent, catalyst, ceramic, graphene, pharmaceutical and other powder properties
- Choice From Gram to Kilogram to meet the needs of small to large scale production
- Patented designs with full automation, easy, safer and cleaner operation and control
- Various processes such as solid electrolytes available
- Optional for QCM, RGA, Glovebox, O3, MLD
More advanced thin film Process solutions
UHV Automatic Multiple Chamber System
State of art UHV systems for advanced material and device R&D
Thin Film Equipment
Ebeam, Sputtering, CVD, PECVD, ALD, Etch, Ash, Oxidation, Ion milling and cluster tool for advanced semiconductor process .
Material & Coating Services
Contact with us for novel material ALD MLD Evaporation coating services with versatile substrate types